M-661PILine Miniature Linear Motor Stage with Ultrasonic Piezo Linear Drive (PhysikInstrumente)
- Smallest Translation Stages with Linear Motor Drive
- Travel Ranges to 20 mm
- Max. Velocity 500 mm/s
- Acceleration to 5 g
- Incremental Motion to 50 nm
- Self Locking at Rest
- XY-Combination Possible
- MTBF 20.000 h
- Vacuum Versions to 10-7 hP
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