Dp 299 en
Digital System for Positioning Stages with Piezoelectric Actuators
Author: Jiří Richtr
Measuring of very small position differences induced by moving of piezoelectric actuators needs appreciable sensitivity, because of small steps of these actuators (in range of fragment of μm), and high rate of data evaluation, in terms of kHz. This diploma thesis aims at developing measuring device with use of differential capacitive sensor actuated by modulated alteranting current signal. Digital processed data will be transferred by standardized interface to PC or to connected part of feedback control system. Control of device will be provided by one of commonly used microcontrollers. Driving signal will be generated by DACs.