Bp 383 en
Modeling and control of a piezoelectric actuator for active and adaptive optics
Author: Marek Hudec
This thesis develops mathematical models of deformable plates used in adaptive and active optics. In particular, an Au-coated cantilevered plate made of silicon with a piezoelectric patch bonded to t is investigated. Models are derived using analytical techniques and finite element method. The results are compared to measurements obtained using a laser beam reflected to a line CCD camera. on linear effects such as creep and hysteresis are carefully investigated and included in the model. Strategies for shape control are outlined.